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Keithley Automated Characterization Suite (ACS) Software
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Flexibility with Programming Preferences for Characterization Applications
ACS features Script Editor, an independent tool with graphical user interface for developing Python code and TSP® scripts for performing instrumentation control, data analysis, and system automation. It offers intuitive ways to create and develop GUI design and manage user libraries and modules.
Automate Your Data Gathering Processes
The wafer prober automation option for ACS makes it easy to interface a variety of popular semi- or fully-automatic wafer probe stations into your test setup to capture large amounts of data quickly. This option includes a wafer description utility, real-time wafer maps with binning capabilities, a cassette sample plan utility, and a post-test cassette and wafer review utility. Many of the tools and capabilities built into ACS enhance automated device characterization.
Share Test Projects and Results
ACS offers a common set of key elements that work across a wide range of hardware configurations, reducing time and increasing productivity. Systems perform consistently from one hardware implementation to another, so, for example, it’s easy to transfer your knowledge of an ACS-based system used in single-device component characterization to another designed for wafer level testing.
Maximize the Productivity of Your Keithley Hardware
The tools in ACS simplify test development and maximize the speed of each Keithley instrument linked into the system. Together, ACS and Keithley TSP-based hardware offer the highest throughput in the industry to lower the cost of test without requiring you to spend time learning new programming concepts or languages before getting the data needed to accomplish your goals.
Supported instruments
| Instrument Type | Model | ACS Edition |
|---|---|---|
| Sensitive | 6200 Series, 2182A | ACS Basic ACS Standard |
| SMU Instruments | 2600B Series: 2601B, 2602B, 2604B, 2611B, 2612B, 2614B, 2634B ,2635B, 2636B 2600A Series: 2601A, 2602A ,2611A, 2612A, 2635A, 2636A 2400 Graphical Touchscreen Series: 2450, 2460, 2460-NFP, 2460-NFP-RACK, 2460-RACK, 2461, 2461-SYS, 2470 2400 Standard Series: 2401, 2410, 2420, 2430, 2440 2606B High Density: 2606B 2650 Series for High Power: 2651A, 2657A |
ACS Basic ACS Standard |
| Parameter Analyzers | 4200A | ACS Basic ACS Standard |
| DMMs | DMM7510, DMM6500, 2010 Series | ACS Basic ACS Standard |
| Switching Systems | 707A/B, 708A/B, 3700A | ACS Basic ACS Standard |
| Pulse Generators | 3400 Series | ACS Basic ACS Standard |
| Probers | TEL P8/P12, TEL T78S/80S, ACCRETECH (Tokyo Semitsu) TSK9/UF200/UF3000/APM60/70/80/90, MPI SENTIO TS2000/TS2000-SE/TS2000-HP/TS3000, FormFactor (Cascade) Summit 12000, FormFactor (Cascade) S300, Suss MicroTec PA200/Cascade CM300, Electroglas EG2X/EG4X, Wentworth Pegasus 300S, Signatone CM500, Yang Sagi3, Micromanipulator P300A, Vector Semiconductor AX/VX Series, Apolowave AP200/AP300, MJC AP-80, Semiprobe SPFA Prober, HiSOL | ACS Standard |
Notes:
- ITM supports 24xx TTI instruments, 26xx instruments and mixed use case.
- User can control any TSP instruments by STM script. Existing ACS STM libraries support specific instruments per library definition.
- User can control any instruments by PTM script. Existing ACS PTM libraries support specific instruments per library definition.
ACS Basic Edition Key Features
US $428
3 Month Subscription
US $1,380
12 Month Subscription
US $3,500
Perpetual
- Designed for packaged devices (MOSFETs, BJTs, IGBTs, diodes, resistors, etc.)
- Rich set of test libraries for fast and easy test setup and execution without programming
- Built-in data analysis tools for quick analysis of parametric data
- Simplified instrument configuration using the automated hardware management tool
Select license option to continue
ACS Standard Edition Key Features
US $8,490
12 Month Subscription
Perpetual
- Supports the following test modules: GUI, Lua Script, Python and C
- Supports a wide array of instruments and probers to accommodate a broad range of applications
- Intuitive GUI simplifies I-V tests, analysis, and results from benchtop to fully automated parametric testers to enhance user experience
- Develop and execute tests at the device, sub-site, site, wafer, and cassette level for increased test capability
Select license option to continue
ACS WLR Edition Key Features
US $13,600
12 Month Subscription
Perpetual
- System configurations from 2 to 44 channels
- Comprehensive JEDEC-compliant test suite
- Optimized for both emerging and mature technologies
- Supports both sequential and parallel testing
- Fully automatic single-site and multi-site capability
- Compatible with all popular wafer probe stations
- Real-time plotting and wafer mapping
Select license option to continue
Applications from Lab to Fab
ACS-based Integrated Test Systems are complete solutions for applications such as parametric die sort, high power semiconductor component characterization, and wafer level reliability testing. When paired with appropriate semi-automatic and fully-automatic probe stations, their hardware configurations and test project development can be easily optimized for specific tasks.
ACS Integrated Test System for Multi-Site Parallel Test Application Note
Increase Reliability Throughput
Reliability tests improve quality, reduce failure rates, ensure high yields, and increase confidence. ACS Software supports Shared Stress methodology for high volume reliability testing, accelerating test times.
Ultra-Low Resistance Measurements using Delta Mode
The 2182A/622X combination is well suited for many nanotechnology applications because it can measure resistance without dissipating much power in the device under test (DUT), which would otherwise invalidate results or even destroy the DUT. Perform Delta Mode tests with ACS Software to incorporate these sensitive measurements into a test system.
Keithley Ultra-Low Resistance Configurations Series 6200/2182A
Power Sequencing for GaN HEMT I-V Characterization
Because of its “normally-on” characteristic, GaN HEMT requires a specific power sequence during I-V characterization. ACS Software supports power sequencing for GaN HEMT characterization of a device without damaging it to capture its intrinsic I-V characteristics.
Power Sequencing for GaN HEMT Characterization Application Note
Serving Applications Across the Semiconductor Workflow
Both ACS Basic and ACS Standard Editions software are used throughout the semiconductor workflow to perform a wide range of tests for detailed characterization of semiconductor devices. ACS Basic and ACS Standard integrated test systems offer:
- Testing at the device, wafer, and cassette level
- Flexible configurations, software, and applications customization
- Interactive & automated system operation
- Powerful combination of GUI & script tools for test module development
Development Phase
ACS Basic Edition software is optimized for parametric testing of component and discrete (packaged) semiconductor devices. This software maximizes the productivity of technicians and engineers in research and development with the following key features:
- Designed for packaged devices (MOSFETs, BJTs, IGBTs, diodes, resistors, etc.)
- Rich set of test libraries for fast and easy test setup and execution without programming
- Built-in data analysis tools for quick analysis of parametric data
- Supports Keithley’s Series 2600B, Series 2400, 2651A, and 2657A System SourceMeter SMU instruments
Integration Phase
ACS Standard Edition software is used in the integration phase for semi-automatic wafer testing including robust process development and wafer level reliability (WLR). This software can be used for a SMU-per-pin system level test. ACS WLR software provides these benefits:
- Fully-automated capabilities to test individual wafers or an entire cassette
- Software for flexible test setup and parallel testing
- Reliability test module (RTM) complies with JEDEC standard test methodologies
- Supports creation of customized test module/procedures
Production Phase
ACS Standard Edition software is also used on fully integrated and automated rack-based customized test systems for process control monitoring (PCM), wafer acceptance testing (WAT) and die sorting. Many of the tools and capabilities built into ACS Standard software enhance automated device characterization:
- Wafer- and cassette-level automation
- Test map to map device and tests to sites and subsites
- Interactive probe station control mode
- Single or per-wafer Keithley data file (KDF) and/or CSV file