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Keithley 4200A-SCS Parameter Analyzer

Accelerate research, reliability and failure analysis studies of semiconductor devices, materials and process development with the 4200A-SCS. The highest performance parameter analyzer, it delivers synchronizing current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V measurements.

Try it FREE on your PC.


DC Current-Voltage
(I-V) Range

10 aA - 1A
0.2 µV - 210 V

(C-V) Range

1 kHz - 10 MHz
± 30V DC bias

Pulsed I-V

±40 V (80 V p-p), ±800 mA
200 MSa/sec, 5 ns sampling rate


Parametric insight, fast and clear.

Advancing your bold discoveries has never been easier. The 4200A-SCS Parameter Analyzer reduces the time from setup to running characterization tests by up to 50%, allowing uncompromised measurement and analysis capability. Plus, embedded measurement expertise provides unparalleled test guidance and gives supreme confidence in the resulting measurements.


  • Advanced measurement hardware for DC I-V, C-V, and pulsed I-V measurement types
  • Begin testing immediately with hundreds of user-modifiable application tests included in the Clarius software
  • Automated real-time parameter extraction, data graphing, analysis functions

Accurate C-V Characterization

Measure single-digit femtofarads with Keithley's newest capacitance-voltage unit (CVU), the 4215-CVU. By integrating a 1 V AC source into Keithley's industry-leading CVU architecture, the 4215-CVU offers low-noise capacitance measurements at frequencies from 1 kHz to 10 MHz.


  • First C-V meter in its class capable of driving a 1 V AC source voltage
  • 1 kHz frequency resolution from 1 kHz to 10 MHz
  • Measure capacitance, conductance, and admittance
  • Measure on up to four channels with the 4200A-CVIV Multiswitch

Making Femtofarad (1e-15F) Capacitance Measurements with the 4215-CVU

4200A SCS Front Femtofarad

Measure. Switch. Repeat.

The 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements without re-cabling or lifting the prober tips. Unlike competing products, the four-channel 4200A-CVIV display provides local visual insight for quick test setup and easy troubleshooting when unexpected results occur.


  • Move C-V measurement to any device terminal without re-cabling
  • User-configurable for low current capability
  • Personalize the names of output channels
  • View real-time test status

Stable low current measurements for I-V Characterization

With the 4201-SMU and 4211-SMU modules you can achieve stable low current measurements in a high capacitance system. With four models of source measure unit (SMU) to choose from, the 4200A-SCS can be customized to meet all of your I-V measurement needs. By offering field Installable Units and optional preamplifier modules, Keithley makes sure that you can make the most accurate low current measurements with little to no downtime.


  • Add an SMU without sending the instrument back to the factory
  • Make femptoamp measurements
  • Up to 9 SMU channels
  • Optimized for long cables or large chucks

Integrated solution with analytical probers and cryogenic controllers

The 4200A-SCS Parameter Analyzer supports many manual and semi-automated wafer probers and cryogenic temperature controllers, including MPI, Cascade MicroTech, Lucas Labs/Signatone, MicroManipulator, Wentworth Laboratories, LakeShore Model 336 cryogenic temperature controller.


  • "Point and click" test sequencing
  • "Manual" prober mode tests prober functionality
  • Fake prober mode enables debugging without removing commands

Cut Costs and Protect Your Investment

Keithley Care plans provide fast, high-quality services at a fraction of the cost of on-demand service events. You are one click or phone call away from obtaining repair coverage - no quotes, purchase orders, or approval delays.

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4200A SCS Front Femtofarad
Datasheet Model Description Pricing
View Datasheet 4200A-SCS-PKA
High Resolution IV
4200A-SCS: Parameter Analyzer mainframe
4201-SMU: Two medium power SMUs for high capacitance setups
4200-PA: One preamplifier
8101-PIV: One test fixture with sample devices
Request a Quote
View Datasheet 4200A-SCS-PKB
High Resolution IV & CV
4200A-SCS: Parameter Analyzer mainframe
4201-SMU: Two medium power SMUs for high capacitance setups
4200-PA: One preamplifier
4215-CVU: One high resolution multi-frequency C-V unit
8101-PIV: One test fixture with sample devices
Request a Quote
View Datasheet 4200A-SCS-PKC
High Power IV & CV
4200A-SCS: Parameter Analyzer mainframe
4201-SMU: Two medium power SMUs for high capacitance setups
4211-SMU: Two high power SMUs for high capacitance setups
4200-PA: Two preamplifier
4215-CVU: One high resolution multi-frequency C-V unit
8101-PIV: One test fixture with sample devices
Request a Quote
View Datasheet 4200-BTI-A
Ultra-fast NBTI/PBTI
For sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology Package 4200-BTI-A includes:
  • (1) 4225-PMU Ultra-Fast I-V Module
  • (2) 4225-RPM Remote Preamplifier/Switch Modules
  • Automated Characterization Suite (ACS) Software
  • Ultra-Fast BTI Test Project Module
  • Cabling
Request a Quote

Biosensor Characterization

Biosensors or bioFETs convert biological response to an analyte into an electrical signal. The Clarius Software that is integrated into the 4200A-SCS includes a project for testing bioFETs. Use it as a starting point to characterize transfer and output characteristics of your biosensors, and expand your work from there.

Download the biosensor application note to get started

Femtofarad Capacitance Measurements

Measure sub-femtofarad capacitances with the 4215-CVU module. By driving 1 V AC, the 4215-CVU can achieve a noise level as low as six attofarads when measuring a 1 fF capacitor. This is just one of dozens of applications included with the Clarius software for measuring capacitance and extracting important parameters.

Making Femtofarad (1e-15F) Capacitance Measurements with the 4215-CVU

Making Optimal Capacitance and AC Impedance Measurements


  • Built-in femtofarad measurement capability
  • 10,000 frequency steps from 1kHz to 10MHz
  • Customize any test to any device using user libraries

Semiconductor and NVM Reliability

Put your new technologies to the test with thorough pulsed I-V characterization. The 4200A-SCS comes with support and ready-to-run tests for the latest in NVRAM technologies from floating gate flash to ReRAM and FeRAM. Dual sourcing and measuring capabilities in current and voltage allow both transient and I-V domain characterization.

Evaluating Hot Carrier Induced Degradation of MOSFET Devices

Single Nanosecond Pulsing Solutions for Non-Volatile Memory Testing

Pulse I-V Characterization of Non-Volatile Memory Technologies

Semiconductor and NVM Reliability
C-V Measurement for High Impedance Applications

C-V Measurement for High Impedance Applications

Use Keithley’s custom Very Low Frequency C-V Technique to analyze the capacitance of your high resistance sample. This technique is performed using only source measure unit (SMU) instruments but can be combined with a 4210-CVU to perform higher frequency measurements as well.

Performing Very Low Frequency Capacitance-Voltage Measurements on High Impedance Devices Using the 4200A-SCS Parameter Analyzer

Tips and Techniques to Simplilfy MOSFET/MOSCAP Device Characterization


  • .01 to 10 Hz frequency range with sensitivity of 1 pF to 10 nF
  • 3½-digit typical resolution, minimum typical of 10 fF

Testing when using Long Cables or Capacitive Fixtures

Use 4201 or 4211-SMUs when making tests requires very long cabling or fixtures with higher capacitances. These SMUs are ideal for connecting to LCD test stations, probers, switch matrices or any other large or complicated tester. Field installable versions allow you to add capacity without returning the unit to a service center.

Making Stable Low Current Measurements with High Test Connection Capacitance Using the 4201-SMU and 4211-SMU

Testing when using Long Cables or Capacitive Fixtures
Resistivity of Materials

Resistivity of Materials

Use a 4200A-SCS with integrated SMUs to easily measure resistivity using a four-point collinear probe or van der Pauw method. Included tests perform repetitive van der Pauw calculations automatically, saving you valuable research time. A maximum current resolution of 10aA and input impedance of >10­­­­16 ohms give you more accurate and precise results.

Resistivity Measurements of Semiconductor Materials Using the 4200A-SCS Parameter Analyzer and a Four-Point Collinear Probe

van der Pauw and Hall Voltage Measurements with the 4200A-SCS Parameter Analyzer

MOSFET Characterization

The 4200A-SCS can hold all the instruments necessary for full characterization of MOS devices through component or on-wafer testing. Included tests and projects solve for oxide thickness of a MOSCap, threshold voltages, doping concentration, mobile ion concentration, and more. All these tests can be run at the touch of a button from a single instrument box.

C‑V Characterization of MOS Capacitors Using the 4200A-SCS Parameter Analyzer

MOSFET Characterization
View Datasheet Data Sheet Module Description
View Datasheet 4200-BTI-A ULTRA FAST BTI PKG Description
View Datasheet 4200-SMU MEDIUM POWER SOURCE-MEASURE UNIT Description
View Datasheet 4200-PA REMOTE PREAMPLIFIER MODULE Description
View Datasheet 4200A-CVIV I-V/C-V MULTI-SWITCH MODULE Description
View Datasheet 4201-SMU MEDIUM POWER SOURCE-MEASURE UNIT Description
View Datasheet 4210-CVU CAPACITANCE-VOLTAGE UNIT Description
View Datasheet 4210-SMU HIGH POWER SOURCE-MEASURE UNIT Description
View Datasheet 4211-SMU HIGH POWER SOURCE-MEASURE UNIT Description
View Datasheet 4215-CVU CAPACITANCE-VOLTAGE UNIT Description
View Datasheet 4225-PMU ULTRA-FAST PULSE MEASURE UNIT Description

Automated Control from Lab to Fab

Keithley's Automated Characterization Suite (ACS) offers complete control of your equipment. Whether you need to control a few instruments on your bench, or automate an entire test rack for production, ACS offers a flexible, interactive environment for device characterization, parametric test, reliability test, and simple functional test.

  • Perform simple 1-off tests or build complex project trees
  • Code with Python inside ACS for unlimited flexibility and control
  • Manual or automated wafer prober control
  • Data management and statistical analysis capabilities

Start Automating

Clarius+ Analysis Suite

The Clarius+ software suite makes it easy to get characterization insights on your materials and devices. It runs natively on the 4200A-SCS to plan, configure, and analyze results of your tests. Clarius can also be installed on any Windows 10 PC to plan and configure tests before running them in your lab, or analyze data after it's gathered.

  • Over 200 pre-configured tests to get your lab running faster
  • Real example data curated gathered by Keithley engineers
  • Built-in contextual help and application notes
  • Monitor Mode to view results real-time

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